JPH0246852U - - Google Patents
Info
- Publication number
- JPH0246852U JPH0246852U JP12320188U JP12320188U JPH0246852U JP H0246852 U JPH0246852 U JP H0246852U JP 12320188 U JP12320188 U JP 12320188U JP 12320188 U JP12320188 U JP 12320188U JP H0246852 U JPH0246852 U JP H0246852U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- temperature measuring
- measuring section
- cap part
- evaporator characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12320188U JPH0246852U (en]) | 1988-09-20 | 1988-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12320188U JPH0246852U (en]) | 1988-09-20 | 1988-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246852U true JPH0246852U (en]) | 1990-03-30 |
Family
ID=31371837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12320188U Pending JPH0246852U (en]) | 1988-09-20 | 1988-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246852U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020097763A (ja) * | 2018-12-18 | 2020-06-25 | 日本電子株式会社 | 間接加熱蒸着源 |
-
1988
- 1988-09-20 JP JP12320188U patent/JPH0246852U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020097763A (ja) * | 2018-12-18 | 2020-06-25 | 日本電子株式会社 | 間接加熱蒸着源 |